Are you interested in learning about the design process for micromachines like accelerometers, gyroscopes, and actuators for microrobots?
This project will focus on the design and layout of micromechanical devices. Layout is the CAD process for creating the files that are used to fabricate integrated circuits (ICs), microelectromechanical systems (MEMS), and other devices like those described in the opening. The process is very similar to PCB design. Layout for analog ICs and MEMS devices is typically manual, time consuming, and sensitive, compared to digital IC layout which is a highly automated and well controlled process. We aim to overcome these aspects through this new design process.
This project seeks to create a design pipeline that goes from analytical design and analysis to layout files in MATLAB that can be imported into a finite element analysis (FEA) tool for simulation and ultimately used in fabrication. In this way, we can automate parts of the layout process.
To start off, students will learn about and design test structures for use in standard fabrication processes in an effort to characterize these processes. Along the way we will also utilize open source software for viewing and verifying layout.
Essay prompt - What are you interested in learning about in this research project and what do you want to get out of the research experience? (1-2 paragraphs, <500 words)
- Learn about and work with MATLAB and Ruby in a real world application
- Learn about MEMS fabrication (device design, analysis, layout)
- Open to students of all backgrounds and experience levels
- See the representative publication for an example of a microrobot developed using an earlier version of this tool